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[Shower Head] end plate-semi batch type
end plate type_Aend plate type_A(상면)end plate type_A(배면)end plate type_A(gashole)end plate type_Bend plate type_B(상면)end plate type_B(배면)end plate type_B(gashole)
 
[Shower Head] mid plate-semi batch type
mid plate (상면)mid plate(배면)
 
[Shower Head] 300mm Nikel Top Plate(Block Type)
 
[TOP LID] 300mm-lid
배면상면
 
[Chamber] 300mm-CVD-Chamber
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[Shower Head] 300mm Nikel Mid Plate(gap-7.5mm)
상면배면gashole
 
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